Microsystems Technology Laboratories

The Microsystems Technology Laboratories (MTL) operates on the belief that advancements in nanoscale science and technology are key to harnessing microelectronics for solving some of the world’s most urgent challenges. These challenges span critical areas such as energy, communications, water, healthcare, information processing, and transportation. MTL's mission is to drive cutting-edge research, education, and innovation at the nanoscale, leveraging MIT’s expertise and resources to develop transformative solutions.

MTL researchers conduct both fundamental and applied research across a wide range of disciplines, including materials, structures, devices, circuits, and systems. With access to MIT’s state-of-the-art nanofabrication facilities and Computer-Aided Design (CAD) services, they work toward groundbreaking advancements that have the potential to reshape industry standards and address global challenges.

The lab’s research portfolio covers integrated circuits, electronic and photonic devices, systems, MEMS, bio-MEMS, molecular devices, nanotechnology, sensors, and actuators. Researchers explore a diverse array of materials beyond traditional silicon (Si) and germanium (Ge), including III-V compound semiconductors, nitride semiconductors, graphene, other 2D materials, polymers, glass, and organic materials.

To support its research community, MTL maintains a robust information technology infrastructure, offering access to cutting-edge CAD tools and process design kits for device, circuit, and system design. Additionally, through strategic partnerships with leading semiconductor manufacturers, MTL provides researchers with access to some of the most advanced commercial integrated circuit fabrication processes available today.

For more details about MTL’s programs and initiatives, please contact Charles Hsu, Consortium Manager, at 617-253-0573.