Microsystems Technology Laboratories

The Microsystems Technology Laboratories (MTL) advances nanoscale science and engineering to enable the next generation of microelectronics and microsystems that address critical needs in computing and AI, communications, energy, healthcare, sensing, security, and transportation. MTL’s mission is to drive leading-edge research, education, and innovation—from fundamental discovery to system-level impact—by convening MIT’s interdisciplinary strengths across microelectronics.

MTL researchers pursue both fundamental and applied research spanning materials, devices, circuits, and integrated systems. Through access to MIT’s shared nanofabrication and characterization infrastructure and MTL’s long-standing design enablement capabilities, researchers accelerate design-to-prototype cycles and develop technologies that can influence future industry directions.

MTL’s research portfolio includes integrated circuits, electronic and photonic devices, MEMS and bio-MEMS, sensors and actuators, molecular and nanoscale devices, and emerging system architectures. Work extends beyond traditional Si and Ge to III–V semiconductors, nitrides, graphene and other 2D materials, polymers, glass, and organic materials, with growing emphasis on heterogeneous integration and advanced packaging pathways that connect devices to real-world systems.

To support this community, MTL maintains robust computing and design infrastructure, including access to state-of-the-art EDA tools and relevant process design kits that enable device, circuit, and system design. Through strategic partnerships with leading semiconductor manufacturers and industry collaborators, MTL also helps researchers access advanced commercial fabrication processes and platforms where appropriate.

For additional information about MTL programs and industry engagement, contact Charles Hsu, Microsystems Industrial Group (MIG) Consortium Manager, at memstar@mit.edu or 617-253-0573.