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6.152 6.152[J] Micro/Nano Processing Technology

Prereq: Calculus II (GIR), Chemistry (GIR), Physics II (GIR), or permission of instructor
U (Fall)
12 Units

Introduces the theory and technology of micro/nano fabrication. Includes lectures and laboratory sessions on basic processing techniques such as vacuum processes, lithography, diffusion, oxidation, and pattern transfer. Students fabricate solar cells, MEMS cantilevers, and microfluidic mixers. Emphasizes interrelationships between material properties and processing, device structure, and the electrical, mechanical, optical, chemical or biological behavior of devices. Provides background for thesis work in micro/nano fabrication. Students engage in extensive written and oral communication exercises.

L. F. Velasquez-Garcia, J. Michel

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Same subject as 3.155[J]

Mathematics (Course 18)

http://catalog.mit.edu/degree-charts/mathematics-course-18/

...Requirements Subjects Science Requirement 6 Humanities, Arts, and...more advanced subjects 18.152 Introduction to Partial...

Mathematics with Computer Science (Course 18-C)

http://catalog.mit.edu/degree-charts/mathematics-computer-science-course-18-c/

...Course 6 subject may not be 6.00...more advanced subjects, 18.152 Introduction to Partial...