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6.152 6.152[J] Micro/Nano Processing Technology

Prereq: Calculus II (GIR), Chemistry (GIR), Physics II (GIR), or permission of instructor
U (Fall)
12 Units

Introduces the theory and technology of micro/nano fabrication. Includes lectures and laboratory sessions on basic processing techniques such as vacuum processes, lithography, diffusion, oxidation, and pattern transfer. Students fabricate solar cells, MEMS cantilevers, and microfluidic mixers. Emphasizes interrelationships between material properties and processing, device structure, and the electrical, mechanical, optical, chemical or biological behavior of devices. Provides background for thesis work in micro/nano fabrication. Students engage in extensive written and oral communication exercises.

L. F. Velasquez-Garcia, J. Michel

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Same subject as 3.155[J]

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